Imaging of an Electret Film Fabricated on a Micro-Machined Energy Harvester by a Kelvin Probe Force Microscope.
Kenta NakazawaKengo FukazawaTakeshi UrumaGen HashiguchiFutoshi IwataPublished in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
- charge coupled device
- high speed
- force field
- imaging systems
- image analysis
- ultra low power
- energy consumption
- high resolution
- energy minimization
- contact force
- medical imaging
- image acquisition
- photon counting
- ccd camera
- image sensor
- image processing
- clinical applications
- visual inspection
- acquired images
- electron beam
- infrared
- light field
- energy saving
- low power
- machine vision