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/Al Thin Films from the Dynamics of Conductive Filaments.
Joel Molina Reyes
Luis Hernández-Martínez
Published in:
Complex. (2017)
Keyphrases
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thin film
high density
short circuit
grain size
dynamical systems
plasma etching
chemical vapor deposition
film thickness
dynamic model
white light interferometry
control system
databases
machine learning algorithms
data sources
viewpoint
three dimensional
data mining
silicon nitride
database