Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes.
Yi-Ta HsiehYung-Chun LeePublished in: NEMS (2012)
Keyphrases
- light emitting diodes
- integrated circuit
- field effect transistors
- high density
- light emitting
- video camera
- thin film
- high speed
- manufacturing systems
- steady state
- low cost
- mathematical analysis
- viewpoint
- digital imaging
- defect detection
- room temperature
- grain size
- object recognition
- high temperature
- data center
- computer vision
- chemical vapor deposition
- computational complexity