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TEM sample preparation of a SEM cross section using electron beam induced deposition of carbon.
Emanuela Ricci
F. Cazzaniga
S. Testai
Published in:
Microelectron. Reliab. (2015)
Keyphrases
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cross section
electron beam
cross sections
x ray
integrated circuit
cross sectional
design parameters
transmission electron microscopy
semiconductor devices
thin film
image analysis
electron microscopy
multislice
carbon nanotubes
three dimensional
electron beam lithography