Thin film PIN photodiodes for optoelectronic silicon on sapphire CMOS.
Alyssa B. ApselEugenio CulurcielloAndreas G. AndreouK. AlibertiPublished in: ISCAS (4) (2003)
Keyphrases
- thin film
- solar cell
- high density
- plasma etching
- chemical vapor deposition
- high speed
- cmos technology
- gate dielectrics
- chance discovery
- low cost
- metal oxide semiconductor
- power consumption
- low power
- silicon on insulator
- silicon nitride
- field effect transistors
- circuit design
- short circuit
- low density
- low voltage
- electron microscopy
- image sensor
- room temperature
- neural network
- motion blur
- white light interferometry