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Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy.
Mauro Ciappa
Alexander Koschik
Maurizio Dapor
Wolfgang Fichtner
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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electron microscopy
x ray
low energy
image stacks
thin film
image data
input image
microscopy images
transmission electron microscopy
edge detection
segmentation algorithm
ground truth
image registration
image classification
image features
barcode
image processing