Alexander Koschik

Publication Activity (10 Years)

Years Active: 2010-2010
Publications (10 Years): 0

Publications

Mauro Ciappa, Alexander Koschik, Maurizio Dapor, Wolfgang Fichtner
Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy. Microelectron. Reliab. 50 (9-11) (2010)