Enhancing the Responsiveness of Thermoelectric Gas Sensors with Boron-Doped and Thermally Annealed SiGe Thin Films via Low-Pressure Chemical Vapor Deposition.
Woosuck ShinMaiko NishiboriToshio ItohNoriya IzuIchiro MatsubaraPublished in: Sensors (2024)
Keyphrases
- thin film
- chemical vapor deposition
- room temperature
- high density
- solar cell
- genetic algorithm
- short circuit
- grain size
- multi layer
- sensor data
- infrared
- sensor networks
- high pressure
- multi sensor
- circuit board
- real time
- data fusion
- particle filtering
- white light interferometry
- flow rate
- sampling procedure
- importance sampling
- particle filter
- single image
- plasma etching
- multi objective optimization
- surface reconstruction