1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing.
Philip TchatchouaGuillaume GratonMustapha OuladsineJulien MullerAbraham TraoréMichel JugePublished in: ICCAD (2022)
Keyphrases
- sensor data
- fault detection
- semiconductor manufacturing
- sensor networks
- multiple sensors
- sensor measurements
- fault diagnosis
- fault identification
- human activities
- failure detection
- discrete event simulation
- process control
- industrial processes
- condition monitoring
- sensor readings
- data streams
- health monitoring
- raw sensor data
- fuel cell
- tennessee eastman
- fault localization
- smart environments
- power plant
- multi sensor
- wireless sensor networks
- artificial intelligence
- machine learning