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Doping of Aluminum Nitride and the Impact on Thin Film Piezoelectric and Ferroelectric Device Performance.
Roy H. Olsson III
Zichen Tang
Michael D'Agati
Published in:
CICC (2020)
Keyphrases
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thin film
solar cell
high density
grain size
multi layer
silicon nitride
electron microscopy
room temperature
short circuit
machine learning
high voltage
chemical vapor deposition
plasma etching
single image
factors influencing