L-Shape based Layout Fracturing for E-Beam Lithography.
Bei YuJhih-Rong GaoDavid Z. PanPublished in: CoRR (2014)
Keyphrases
- electron beam
- electron beam lithography
- level set
- x ray
- object detection
- object recognition
- integrated circuit
- layout design
- distance maps
- shape representation
- design parameters
- genetic algorithm
- shape features
- databases
- machine learning
- hierarchically organized
- data mining
- data sets
- image registration
- computer vision
- artificial intelligence
- information retrieval