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A temperature study of photosensitivity in SLS polycrystalline silicon TFTs.
Loukas Michalas
Anastasia Syntychaki
Matroni Koutsoureli
George J. Papaioannou
Apostolos T. Voutsas
Published in:
Microelectron. Reliab. (2012)
Keyphrases
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thin film
chemical vapor deposition
high speed
high density
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empirical studies
experimental study
infrared
theoretical framework
room temperature