thin films grown by metal-organic molecular beam epitaxy.

Myoung-Seok Kim Young-Don Ko Tae-Houng Moon Jae-Min Myoung Ilgu Yun

Published in: Microelectron. J. (2006)

Keyphrases

thin film
grain size
chemical vapor deposition
silicon nitride
high density
cross section
spatial distribution
three dimensional
multi layer
short circuit
drug discovery
low cost
solar cell
plasma etching
light emitting diodes
room temperature
reinforced concrete
viewpoint
machine learning