History of some early developments in ion-implantation technology leading to silicon transistor manufacturing.
Richard B. FairPublished in: Proc. IEEE (1998)
Keyphrases
- metal oxide semiconductor
- high speed
- case study
- technological advances
- integrated circuit
- rapid development
- low cost
- silicon dioxide
- field effect transistors
- low power
- paradigm shift
- current status
- cost effective
- information technology
- circuit design
- emerging technologies
- product design
- quality control
- data processing
- manufacturing systems
- high density
- website
- advanced technology
- computer systems
- computer integrated manufacturing