Towards high performance sub-10nm finW bulk FinFET technology.

Thomas Chiarella S. Kubicek E. Rosseel Romain Ritzenthaler Andriy Hikavyy P. Eyben A. De Keersgieter L.-Å. Ragnarsson M.-S. Kim S.-A. Chew Tom Schram S. Demuynck Miroslav Cupák Luc Rijnders Morin Dehan Naoto Horiguchi Jérôme Mitard Dan Mocuta Anda Mocuta Aaron Voon-Yew Thean

Published in: ESSDERC (2016)

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