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Plasma etch and dielectric deposition processes for TSV Reveal.

Keith BuchananDave ThomasHefin GriffithsKathrine CrookDaniel ArchardMark CarruthersMasahiko Tanaka
Published in: 3DIC (2011)
Keyphrases
  • chemical vapor deposition
  • thin film
  • high density
  • plasma etching
  • electrical properties
  • information retrieval
  • artificial intelligence
  • database
  • stochastic processes