Keith Buchanan

Publication Activity (10 Years)

Years Active: 2009-2011
Publications (10 Years): 0

Publications

Keith Buchanan, Dave Thomas, Hefin Griffiths, Kathrine Crook, Daniel Archard, Mark Carruthers, Masahiko Tanaka
Plasma etch and dielectric deposition processes for TSV Reveal. 3DIC (2011)
Keith Buchanan, Stephen Burgess, Kathrine Giles, Matthew Muggeridge, Hao Zhao
Etch, dielectrics and metal barrier-seed for low temperature through-silicon via processing. 3DIC (2009)