Micromachining of silicon with excimer laser in air and water medium.

Alok Kumar Das Partha Saha

Published in: Int. J. Manuf. Technol. Manag. (2010)

Keyphrases

low cost
high speed
high density
electrical energy
carbon dioxide
laser beam
water supply
water quality
neural network
fiber optic
image sequences
search engine
database
liquid crystal
water level
case study
information systems
silicon dioxide
water consumption
plasma etching
gallium arsenide