As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability.
Baojun TangKris CroesY. BarbarinY. Q. WangRobin DegraeveY. LiMaria Toledano-LuqueThomas KaueraufJürgen BömmelsZsolt TokeiIngrid De WolfPublished in: Microelectron. Reliab. (2014)