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As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability.

Baojun TangKris CroesY. BarbarinY. Q. WangRobin DegraeveY. LiMaria Toledano-LuqueThomas KaueraufJürgen BömmelsZsolt TokeiIngrid De Wolf
Published in: Microelectron. Reliab. (2014)
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