Silicon nanowire temperature sensor and its characteristic.

Chuan-Po Wang Chien-Wei Liu Chie Gau

Published in: NEMS (2011)

Keyphrases

heat flow
sensor networks
multi sensor
high speed
high sensitivity
sensor data
real time
space charge
chemical vapor deposition
low cost
data acquisition
high density
high temperature
sensor fusion
charge coupled device
silicon dioxide
room temperature
electric field
data streams