Thin-film Lithium Niobate Photonic Devices on 8-inch Silicon Substrates.
Hengyu WangYang XuZhaoyi LiLianxi JiaShiyang ZhuYuxi WangZhanshi YaoShaonan ZhengQize ZhongYuan DongTing HuPublished in: OFC (2023)
Keyphrases
- thin film
- high density
- solar cell
- plasma etching
- magnetic tape
- chemical vapor deposition
- mobile devices
- short circuit
- silicon nitride
- grain size
- low density
- electron microscopy
- room temperature
- data center
- semiconductor devices
- multi layer
- database
- white light interferometry
- disk drives
- electric vehicles
- query processing
- databases