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DC Performance Variations by Grain Boundary in Source/Drain Epitaxy of Sub-3-nm Nanosheet Field-Effect Transistors.
Jun-Sik Yoon
Jinsu Jeong
Seunghwan Lee
Junjong Lee
Sanguk Lee
Jaewan Lim
Rock-Hyun Baek
Published in:
IEEE Access (2022)
Keyphrases
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schottky barrier
field effect transistors
high density
edge map
early warning
semiconductor devices
databases
machine learning
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multiple sources
real time
genetic algorithm
image processing
line segments
object boundaries
mathematical analysis