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Rapid Fabrication of Hydrogel Microstructures Using UV-Induced Projection Printing.
Wenguang Yang
Haibo Yu
Wenfeng Liang
Yuechao Wang
Lianqing Liu
Published in:
Micromachines (2015)
Keyphrases
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high speed
high density
integrated circuit
low cost
electron beam
electron beam lithography
information systems
projection method