Fabrication and Characteristics of an nc-Si/c-Si Heterojunction MOSFETs Pressure Sensor.

Xiaofeng Zhao Dianzhong Wen Gang Li

Published in: Sensors (2012)

Keyphrases

metal oxide
chemical vapor deposition
sensor data
computer vision
si sio
database
real time
databases
neural network
data streams
sensor networks
high density
plasma etching