Films Deposited by Atomic Layer Deposition.
Rachel L. WilsonCristian Eugen SimionChristopher S. BlackmanClaire J. CarmaltAdelina StanoiuFrancesco Di MaggioJames A. CovingtonPublished in: Sensors (2018)
Keyphrases
- chemical vapor deposition
- electrical properties
- permalloy films
- thin film
- rf sputtering
- film thickness
- silicon nitride
- multi layer
- magnetic field
- high density
- transmission line
- application layer
- real world
- low cost
- database
- data mining
- single layer
- multiple layers
- room temperature
- expert systems
- upper layer
- multiscale
- image sequences
- information systems