Fabrication of silicon micro-rod array with controlled density and size distribution using porous silicon.
Bahareh YaghootkarMahmoud AmouzgarMojtaba KahriziPublished in: IECON (2012)
Keyphrases
- high density
- low density
- plasma etching
- high speed
- semiconductor devices
- low cost
- transmission electron microscopy
- data distribution
- data center
- spatial distribution
- probability density
- small size
- silicon dioxide
- charge coupled device
- standard deviation
- density function
- computational complexity
- silicon on insulator
- data sets