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Pattern Similarity Metrics for Layout Pattern Classification and Their Validity Analysis by Lithographic Responses.
Atsushi Takahashi
Shimpei Sato
Hiroki Ogura
Yu-Min Sung
Ting-Chi Wang
Published in:
ISVLSI (2018)
Keyphrases
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pattern classification
similarity metrics
pattern recognition
data analysis
feature extraction
nearest neighbor rule
similarity measure
data mining
information retrieval
self organizing maps
semantic similarity
similarity metric
similarity measurement
fuzzy classifier