A System Based on Capacitive Interfacing of CMOS With Post-Processed Thin-Film MEMS Resonators Employing Synchronous Readout for Parasitic Nulling.
Liechao HuangWarren Rieutort-LouisAlexandra GualdinoLaura TeagnoYingzhe HuJoao MouroJosue Sanz-RobinsonJames C. SturmSigurd WagnerVirginia ChuJoao Pedro CondeNaveen VermaPublished in: IEEE J. Solid State Circuits (2015)