Micromachined inductor integrated with a patterned soft magnetic thin film.

Yu-Che Huang Ben-Hwa Jang Weileun Fang

Published in: NEMS (2013)

Keyphrases

thin film
film thickness
short circuit
solar cell
electron microscopy
high density
multi layer
grain size
room temperature
white light interferometry
database systems
defect detection
chance discovery
chemical vapor deposition