-metal thin film capacitors.

P. C. Juan H. C. Chou J. Y. M. Lee

Published in: Microelectron. Reliab. (2005)

Keyphrases

thin film
grain size
short circuit
chemical vapor deposition
high density
silicon nitride
solar cell
multi layer
metal oxide
databases
electron microscopy
white light interferometry
room temperature
back propagation
case based reasoning
data analysis
data mining