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/n-LTPS/glass thin film MOS Schottky diode CO gas sensing performances on operating temperature.
Feng-Renn Juang
Yean-Kuen Fang
Hung-Yu Chiu
Published in:
Microelectron. Reliab. (2012)
Keyphrases
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thin film
high density
room temperature
chemical vapor deposition
film thickness
genetic algorithm
computer simulation
electron microscopy
sensor networks
low density
solar cell
multi layer
grain size
flow rate
short circuit
data center
databases
plasma etching
space charge
light emitting