) Coating on Thin-Film Cryoresistors.

Ossi M. Hahtela A. F. Satrapinski Päivi H. Sievila Nikolai Chekurov

Published in: IEEE Trans. Instrum. Meas. (2009)

Keyphrases

thin film
high density
short circuit
solar cell
multi layer
tool wear
manufacturing process
fluidized bed
chemical vapor deposition
machine learning
grain size
room temperature