Planar fabrication of a mesoscale voice coil actuator.

Benjamin Goldberg Michael Karpelson Onur Özcan Robert J. Wood

Published in: ICRA (2014)

Keyphrases

multi layer
high density
high speed
integrated circuit
control system
curved surfaces
electron beam
ground plane
emotion recognition
text to speech
dc motor
x ray
planar surfaces
electrical properties
working principle
thin film transistor