Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light.
Marius RutkauskasC. FarrellChristophe DorrerKara L. MarshallTom CrawfordTed R. LundquistP. VedagarbhaK. EringtonD. BodohDerryck Telford ReidPublished in: Microelectron. Reliab. (2016)