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Visible photoluminescence from Ge nanoclusters implanted in nanoporous aluminum oxide films.
Walter M. de Azevedo
Eronides Felisberto da Silva Júnior
Elder A. de Vasconcelos
Henri Boudinov
Published in:
Microelectron. J. (2005)
Keyphrases
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silicon nitride
thin film
electrical properties
silicon dioxide
high density
grain size
high temperature
film thickness
multi layer
neural network
database
data sets
data mining
computer vision