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Fabrication and characterization of ZnO/Al2O3 thin film transistors: channel length effect study.
Walid Filali
Fouaz Lekoui
Boumediene Zatout
Laid Henni
Sidali Abdelmoumene
Elyes Garoudja
Rachid Amrani
Slimane Oussalah
Published in:
SSD (2022)
Keyphrases
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thin film
high density
integrated circuit
neural network
plasma etching
low density
chemical vapor deposition
databases
decision making
high speed
multi layer
electron microscopy
grain size
white light interferometry