Polymer film deposition with fine pitch openings by stencil printing.
Hirokazu EzawaMasaharu SetoMasahiro MiyataHiroshi TazawaPublished in: Microelectron. Reliab. (2003)
Keyphrases
- film thickness
- room temperature
- permalloy films
- thin film
- rf sputtering
- high speed
- low cost
- electrical properties
- motion picture
- coarse to fine
- magnetic field
- morphological operators
- transmission line
- machine learning
- si sio
- visual effects
- refractive index
- morphological filters
- high density
- binary images
- plasma etching
- digital images
- artificial neural networks
- neural network