Co-Optimization of Circuits, Layout and Lithography for Predictive Technology Scaling Beyond Gratings.
Tejas JhaveriVyacheslav RovnerLars LiebmannLarry T. PileggiAndrzej J. StrojwasJason HibbelerPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2010)
Keyphrases
- case study
- optimization algorithm
- global optimization
- rapid development
- electron beam lithography
- optimization process
- optimization method
- optimization problems
- cmos technology
- cost effective
- personal computer
- data sets
- information technology
- constrained optimization
- predictive model
- joint optimization
- electron beam
- long period
- chip design
- neural network