Polycrystalline Silicon Thin Film Obtained By Aluminum Induced Crystallization.

X. B. Zeng J. F. Li X. W. Sun G. J. Qi X. T. Zeng

Published in: Int. J. Comput. Eng. Sci. (2003)

Keyphrases

thin film
high density
solar cell
plasma etching
chemical vapor deposition
silicon nitride
multi layer
film thickness
grain size
low cost
electron microscopy
machine learning
white light interferometry
short circuit
data mining
field effect transistors
room temperature
low density
back propagation
fuzzy logic