Transfer Learning for Rapid Extraction of Thickness from Optical Spectra of Semiconductor Thin Films.
Siyu Isaac Parker TianZekun RenSelvaraj VenkatarajYuanhang ChengDaniil BashFelipe OviedoJ. SenthilnathVijila ChellappanYee-Fun LimArmin G. AberleBenjamin P. MacLeodFraser G. L. ParlaneCurtis P. BerlinguetteQianxiao LiTonio BuonassisiZhe LiuPublished in: CoRR (2022)
Keyphrases
- transfer learning
- thin film
- plasma etching
- film thickness
- white light interferometry
- grain size
- learning tasks
- refractive index
- reinforcement learning
- active learning
- knowledge transfer
- labeled data
- machine learning
- cross domain
- transfer knowledge
- high density
- semi supervised learning
- collaborative filtering
- multi layer
- domain adaptation
- information extraction
- low density
- manifold alignment
- room temperature
- learning algorithm
- machine learning algorithms
- text categorization
- multi task
- text classification
- text mining
- chemical vapor deposition
- spatial distribution
- target domain
- single view
- transferring knowledge
- data analysis
- e learning