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Ensuring the reliability of electron beam crosslinked electric cables by the optimization of the dose depth distribution with Monte Carlo simulation.

Mauro CiappaLuigi MangiacapraMaria StangoniStephan OttWolfgang Fichtner
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • monte carlo simulation
  • electron beam
  • monte carlo
  • network reliability
  • markov chain
  • optimization algorithm
  • global optimization
  • additive model
  • x ray
  • design parameters
  • computer aided
  • electron beam lithography