Modeling and control of aggregate thin film surface morphology using stochastic PDEs and a patterned deposition rate profile.
Xinyu ZhangJianqiao HuangGerassimos OrkoulasPanagiotis D. ChristofidesPublished in: CDC/ECC (2011)
Keyphrases
- thin film
- film thickness
- white light interferometry
- high density
- multi layer
- short circuit
- grain size
- image processing
- mathematical morphology
- solar cell
- room temperature
- partial differential equations
- surface reconstruction
- electron microscopy
- control system
- plasma etching
- optimal control
- chemical vapor deposition
- neural network
- low cost
- morphological operators
- d objects
- control method
- database systems
- image denoising