Fabrication of micro-sensors based on a parylene thin-film substrate for monitoring proton exchange membrane fuel cells.
Chi-Yuan LeeChienliu ChangPin-Cheng ChanRen-De HuangMaing-Sao TongPublished in: NEMS (2010)
Keyphrases
- thin film
- high density
- magnetic recording
- film thickness
- plasma etching
- real time
- living cells
- health monitoring
- electrical properties
- sensing devices
- short circuit
- sensor networks
- semiconductor devices
- chemical vapor deposition
- monitoring system
- low density
- data acquisition
- data center
- monte carlo simulation
- sensor data
- liquid crystal displays
- wireless sensor
- electron microscopy
- white light interferometry
- solar cell
- multi layer
- multi sensor
- room temperature
- neural nets
- feed forward
- learning tasks
- data analysis