Annealing effect on the stability of platinum thin films covered by SiO2 or SiNx layer.

Li Xiao Zhan Zhao Lidong Du Shaohua Wu Qimin Liu

Published in: NEMS (2013)

Keyphrases

thin film
film thickness
multi layer
silicon dioxide
silicon nitride
high density
short circuit
grain size
simulated annealing
application layer
plasma etching
chemical vapor deposition
refractive index
solar cell
database
room temperature
neural network