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thin films prepared by pulsed laser deposition.

S. Calderón VL. Escobar-AlarcónEnrique CampsS. MuhlM. RiveraI. BentacourtJ. OlayaA. Mariño
Published in: Microelectron. J. (2008)
Keyphrases
  • thin film
  • high density
  • grain size
  • film thickness
  • chemical vapor deposition
  • plasma etching
  • laser beam
  • fiber optic
  • solar cell
  • short circuit
  • room temperature
  • database
  • white light interferometry