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Tensile tests of micro anchors anodically bonded between Pyrex glass and aluminum thin film coated on silicon wafer.
Yu-Qun Hu
Ya-Pu Zhao
Tongxi Yu
Published in:
Microelectron. Reliab. (2008)
Keyphrases
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thin film
solar cell
high density
plasma etching
silicon nitride
chemical vapor deposition
short circuit
grain size
multi layer
space charge
low cost
finite element
integrated circuit
electron microscopy
white light interferometry
room temperature
neural network