Atomic force microscopy studies of SiGe films and Si/SiGe heterostructures.

Martin A. Lutz Randall M. Feenstra Jack O. Chu

Published in: IBM J. Res. Dev. (1995)

Keyphrases

solar cell
thin film
chance discovery
chemical vapor deposition
atomic force microscopy
dual channel
grain size
short circuit
plasma etching
film thickness
high density
mixed signal
silicon nitride
risk management
data mining
multi channel
multi agent
image processing