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Mass patterning of polysiloxane layers using spin coating and photolithography techniques.
B. Torbiéro
M. L. Pourciel-Gouzy
Iryna Humenyuk
J. B. Doucet
A. Martinez
Pierre Temple-Boyer
Published in:
Microelectron. J. (2006)
Keyphrases
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integrated circuit
manufacturing systems
multi layer
information retrieval
decision making
multiple layers
real world
social networks
multiresolution
quality control
manufacturing process
single layer
database
artificial intelligence
tool wear
digital mammography