A sequential resampling approach for imbalanced batch process fault detection in semiconductor manufacturing.
Yi ZhangPeng PengChongdang LiuYanyan XuHeming ZhangPublished in: J. Intell. Manuf. (2022)
Keyphrases
- fault detection
- industrial processes
- semiconductor manufacturing
- fault diagnosis
- process control
- power plant
- real time
- databases
- fault identification
- fault detection and diagnosis
- discrete event simulation
- search space
- data mining
- intelligent systems
- failure detection
- expert systems
- chemical process
- fuel cell
- tennessee eastman