Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions.
Jacopo FrancoHiroaki ArimuraJ.-F. de MarneffeS. BrusRomain RitzenthalerE. Dentoni LittaKris CroesBen KaczerN. HoriguchiPublished in: VLSI Technology and Circuits (2023)